AFM Analysis of Gas Cluster Ion Impact Craters and Smoothing
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چکیده
منابع مشابه
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Atomic force microscopy ~AFM! and high-resolution transmission electron microscope ~HRTEM! cross section imaging of individual gas cluster ion impact craters on Si~100! and Si~111! substrate surfaces is examined. The comparison between 3 and 24 kV cluster impacts from Ar and O2 gas sources is shown. Results for low fluence (10 ions/cm) 24 kV Ar individual cluster impacts onto a Si~100! and Si~1...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2002
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s143192760210376x